INTEGRATED CIRCUIT MANUFACTURING TECHNOLOGY
Matlamat kursus ini ialah memberikan pengetahuan dan kefahaman konsep dalam proses-proses fabrikasi peranti semikonduktor dan litar bersepadu. Topik-topik yang diliputi adalah penggunaan bilik-bersih, proses-proses fotolitografi, punaran, oksidasi, difusi, pembenaman ion, deposit filem-nipis, pelogaman, perwayaran dan pempakejan litar bersepadu.
The aims of this course are to provide knowledge and comprehension on the chronological fabrication processes of semiconductor devices, mainly integrated circuits. Topics covered are cleanroom facility, photolitography, etching, oxidation, diffusion, ion-implantation, thin-film deposition, metallization, interconnects, and IC packaging.
Matlamat kursus ini ialah memberikan pengetahuan dan kefahaman konsep dalam proses-proses fabrikasi peranti semikonduktor dan litar bersepadu. Topik-topik yang diliputi adalah penggunaan bilik-bersih, proses-proses fotolitografi, punaran, oksidasi, difusi, pembenaman ion, deposit filem-nipis, pelogaman, perwayaran dan pempakejan litar bersepadu.
The aims of this course are to provide knowledge and comprehension on the chronological fabrication processes of semiconductor devices, mainly integrated circuits. Topics covered are cleanroom facility, photolitography, etching, oxidation, diffusion, ion-implantation, thin-film deposition, metallization, interconnects, and IC packaging.
- Lecturer: PROF. DR. SAWAL HAMID BIN MD ALI
- Lecturer: DR. NORAZREEN BINTI ABD AZIZ
- Lecturer: DR. ISKANDAR BIN YAHYA